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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Many alterations and modifications may be possible within the scope of the invention. [0194] Especially, in the foregoing embodiments, a copper wiring (copper film 26 b) is used, and the wiring may be made of, aside from copper, silver, aluminium or an alloy mainly comprised of these metals.
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