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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The holding device includes, in the circumferential direction of the substrate circumference, a recess into which a ring made from a material which differs from the material of the holding device, e.g. made from silicon, silicon carbide, quartz or gallium arsenide, is introduced, preferably exchangeably.
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