About: http://webisa.webdatacommons.org/10019973

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, there can be used a thermally oxidized film, or vacuum deposition, sputter deposition or ion cluster beam deposition of a metal such as gold or tungsten, and in combination with lift off.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr