About: http://webisa.webdatacommons.org/120573332

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another object of the present invention is a method of producing a semiconductor device comprising a conductive pattern of conductive lines with an interwiring spacing of less than 1 micron without shorting between the conductive lines.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr