| http://www.w3.org/ns/prov#value | - Preferably, a material such as barium borosilicate glass, alumino-borosilicate glass. or quartz can be used as a substrate 1100 in FIG. 14A. An inorganic insulating film is formed on the surface of the substrate 1100 to have a thickness of 10 to 200 nm as a base insulating film 1101.
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