About: http://webisa.webdatacommons.org/132033346

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate isolation is composed of silicon oxide, silicon nitride or the combination of both kinds of material to form a multi-layer structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr