About: http://webisa.webdatacommons.org/150661340

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the gate metal layer is comprised of a tungsten/silicon alloy, however, other metals are suitable, including titanium, titanium-nitride, molybdenum, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr