About: http://webisa.webdatacommons.org/173988052

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, this film mainly composed of aluminum is patterned to form a gate electrode 113.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com