About: http://webisa.webdatacommons.org/213746561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	cles, copper, copper oxides, and any other materials that are the by-products of the CMP process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au