About: http://webisa.webdatacommons.org/28073531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, the two-tier ball bumps 301, 302 after the leveling step provides electroconductive spacers that gives a distance of e.g. 100 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com