About: http://webisa.webdatacommons.org/29801585

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another aspect, the present invention is a method for depositing a layer of titanium, tantalum, or copper metal for any integrated circuit application.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com