| http://www.w3.org/ns/prov#value | - The single layer film composed of either of Cr, Al, Mo, Ta, Cu, Ti, W, Al--Cu and Al--Si--Cu, and alloy among them, and transparent conductive material such as ITO or the like, or either of multi-layer film laminated with them is filmed as thick as approximately 0.1 ??m through 1.0 as shown in FIG. 7(E) so as to form the source line 9 and the drain electrode 10 which are divided into two in such a
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