About: http://webisa.webdatacommons.org/315194119

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One such case is the problem of determining the local characteristics of thin transparent layers over a substrate, e.g. insulation and passivation layers in the production of integrated circuits.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk