About: http://webisa.webdatacommons.org/347714817

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still another advantage of the present invention is a method for forming high-density in-laid contacts and metallization patterns in a dielectric layer, without reduction in conductivity and dielectric isolation properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com