| http://www.w3.org/ns/prov#value | - ess than 8; and the metal oxide can be referred to as MOz, where M is a metal, O is oxygen, and z is a number greater than 0 and typically less than 8. [0021] The metal oxide dielectric material has a metal in common with the layer comprising metal carbide, metal boride and/or metal nitride, and such can improve stacking of the dielectric material when the dielectric material is directly against t
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