About: http://webisa.webdatacommons.org/353200526

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this example, six kinds of samples are produced in which the gate insulating film 705 is formed in different manners and the heat treatment is performed in different manners.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com