About: http://webisa.webdatacommons.org/355197185

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another advantage of the present invention is a method of fabricating a semiconductor device by tailoring the thickness of the sidewall spacers for individual transistors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com