About: http://webisa.webdatacommons.org/357524650

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, a problem still remains in that there is a need for an efficient method for forming an opening which can be efficiently used in combination with the method of forming an epitaxial growth layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com