| http://www.w3.org/ns/prov#value | - Lastly, stepper system 10 includes a controller 24 which may include electronic control circuitry and apparatus, including computer control such as through a processor or the like, so that various control actions may be taken with respect to other items in stepper system 10; by way of example, therefore, control arrows are shown from controller 24 to light source 12, projection lens 16, and wafer
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