About: http://webisa.webdatacommons.org/394136332

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One aspect of the present invention is a method for producing a contact comprising the steps of: forming a Co or Ni silicide contact positioned on a substrate; annealing the Co or Ni silicide in an ambient comprising nitrog
http://www.w3.org/ns/prov#wasQuotedFrom	google.com