| http://www.w3.org/ns/prov#value | - A method of forming a structure of substantially uniform cross-sectional area on a substrate, comprising sequentially the steps of:a) forming a first layer of a material not normally soluble in a developing solution but becoming soluble therein upon exposure to actinic radiation, said material including an insolubilizing compound capable of diffusing into solubilized portions of said material to m
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