| http://www.w3.org/ns/prov#value | - of FIGS. 8, 9, 13-15, 17A-18C, 34A-34D. The interferometric modulator display device made by the process described herein may have a relatively small gap (e.g., between about 6,500 ??? and about 20 ??m, and particularly between about 2 ??m and about 15 ??m or between about 10,000 ??? and about 5 ??m) between the front substrate and the backplate thereof.
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