About: http://webisa.webdatacommons.org/426038795

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This application specifies that preferably from 10 ??m to 60 ??m, and particularly preferably 20 ??m to 50 ??m, of material are removed in the case of the polishing of silicon wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com