About: http://webisa.webdatacommons.org/429575519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross sectional view showing a micro-mechanical membrane tilt-mirror optical switch including a deformable mirror in accordance with the prior art;
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca