About: http://webisa.webdatacommons.org/444110321

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, enhancement of yield is realized since the steps such as resist coating, light-exposure, development, post-bake, and etching, for example, that are required in forming a contact hole can be eliminated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au