| http://www.w3.org/ns/prov#value | - The spacer 112 may be an epoxy, solder mask or other suitable insulating materials, such as, silicon oxide, silicon nitride, silicon oxinitride, metal oxide or combination thereof of inorganic materials, or polyimide (PI), butylcyclobutene (BCB), parylene, polynaphthalenes, fluorocarbons or accrylates of organic materials.
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