About: http://webisa.webdatacommons.org/83703694

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the invention has been described in regard to preferred metallization of aluminum, it may be applied as well to other metals such as copper applied over the barrier layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com