About: http://webisa.webdatacommons.org/94954864

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of the substrate 20 supporting the sacrificial mass 25 is then covered with a layer 26, for example of Si3N4 or silicon, then a layer 27 of a conducting material such as aluminium, gold or nickel (see FIG. 6F).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com