About: http://webisa.webdatacommons.org/98652040

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sidewall spacers can be made of materials such as silicon nitride, silicon dioxide, combinations thereof, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es