About: http://webisa.webdatacommons.org/101265237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sacrificial layer 224 may be formed using materials such as BPSG, PSG, USG, SOG, TEOS, HDP-CVD oxide, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com