| http://www.w3.org/ns/prov#value | - However, the splitter 5510 or 6510 may instead be formed of another material such as quartz, for example. [0223]FIG. 67 illustrates another way of improving plasma uniformity in the torroidal source reactor of FIG. 24 by introducing a set of four annular electromagnets 6710, 6720, 6730, 6740 along the periphery of the reactor, the windings of each electromagnet being controlled by a magnet current
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