| http://www.w3.org/ns/prov#value | - However, there is a problem in that the manufacturing costs of both themodule structures shown in FIGS. 1A, 1B and 2 are increased due to an increase in the number of module fabricating steps and the complicated fabrication steps.Furthermore, as for a structure in which a plurality of cells is fabricated on a single substrate in a batch in a serial connecting form, some other structures have been
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