About: http://webisa.webdatacommons.org/111264430

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In such a case, a combination of a plurality of control elements including the concentration and discharge time of an etching solution is synthetically assessed to determine no processing abnormality is present.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com