About: http://webisa.webdatacommons.org/119170043

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, the present inventor et al. clarify that each of Ru, Pt, and Ir is a material usable for a storage capacitor electrode material and a copper wiring barrier metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com