About: http://webisa.webdatacommons.org/121014925

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is used in microelectronics as a contact material, for conductive layers, and barrier layers between silicon and other metals, e.g. tungsten or copper.
http://www.w3.org/ns/prov#wasQuotedFrom	wikipedia.org