About: http://webisa.webdatacommons.org/157823358

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(a) the step of forming a thin film, which has one or a plurality of films including a film liable to be deposited on a side wall, directly or indirectly over a first major surface of a wafer;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es