| http://www.w3.org/ns/prov#value | - It is preferred that the working fluid has high light transmittance and insulation properties, a high dielectric constant and a refractive index close to a refractive index of the transparent substrate (SUB1) of the MEMS substrate 101 and the transparent substrate (SUB2) of the AP substrate 109, and it is preferred that the working fluid is an oil and so on which does not prevent to the movement o
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