About: http://webisa.webdatacommons.org/166997371

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The patch 610 can be formed by well known masking and deposition techniques such as photoresist patterning and sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr