About: http://webisa.webdatacommons.org/171805752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method of fabricating an integrated circuit which involves patterning photoresist layers and transferring an opening in the pattern into a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com