| http://www.w3.org/ns/prov#value | - Here, in FIG. 62, active regions are denoted as 22 and wires are denoted as 23. [0013] The development of scaling down has been particularly remarkable in recent years and there is a tendency that the height of the wires have become larger in order to decrease the wiring resistance and, therefore, the situation of the above described problem is more and more prone to occur.
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