About: http://webisa.webdatacommons.org/193973250

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 13A and 13B are a top view and side view, respectively, of a pedestal plate used with one embodiment of the two layer susceptor of this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com