About: http://webisa.webdatacommons.org/207426949

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a case where, in the peripheral portion of the wafer, one or more of the measuring points are located in a region not having the pattern with respect to which the offset measurement has been done.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com