About: http://webisa.webdatacommons.org/248909941

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a sectional side view of a unit magnification catadioptric lens of the improved step-and-repeat alignment and exposure system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au