About: http://webisa.webdatacommons.org/258675255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, what is desired is a system and method for planarizing semiconductor wafers which does not produce significant amounts of liquid waste by-products.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com