About: http://webisa.webdatacommons.org/259680640

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a plan view illustrating the positional relationship between the plane position measurement illuminating beam, the normal-direction measurement illuminating beam and their diffracted lights and the apparatus components.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com