| http://www.w3.org/ns/prov#value | - In the resin (D), similarly to the acid-decomposable resin (A), it is preferred that impurities such as metal are of course little contained and as well, the content of residual monomers or oligomer components is not more than a specific value, for example, 0.1 mass % by HPLC. By satisfying these conditions, not only the resist can be more improved in the sensitivity, resolution, process stability
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