| http://www.w3.org/ns/prov#value | - One method of the invention comprises the steps of providing a mold according to a final shape of said body, the shape including a diaphragm and a connecting joint integrally formed on said body, said connecting joint permitting direct connection and mounting to a fluid path means; putting a sublimable mold insert for forming a cavity in said hollow ceramic body and a through-passage from said cav
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