| http://www.w3.org/ns/prov#value | - Another object of the present invention is a method of projecting an image in a photolithographic process comprising: generating a beam of energy from a source of exposure energy; passing a portion of the energy beam through an optical element, a refractive lens assembly comprising at least one meniscus lens, a plano-convex lens, and an air gap disposed between the meniscus lens and the plano-conv
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