About: http://webisa.webdatacommons.org/272198806

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This method is particularly effective in the case where the hardening process has been performed relative to the opaque pattern made of the resist film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com