| http://www.w3.org/ns/prov#value | - This method is mainly applied to a case where the number of changing operations ever performed is still small, such as a case where the combination of a light exposure amount and a focus value is changed for the first time from the start of the process of product wafers W. It may be arranged such that the combination of a light exposure amount and a focus value can be manually changed by an operat
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